?url_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Adc&rft.title=Data+Engineering+for+the+Analysis+of+Semiconductor+Manufacturing+Data&rft.creator=Turney%2C+Peter&rft.subject=Machine+Learning&rft.subject=Artificial+Intelligence&rft.description=We+have+analyzed+manufacturing+data+from+several+different+semiconductor+%0Amanufacturing+plants%2C+using+decision+tree+induction+software+called+%0AQ-YIELD.+The+software+generates+rules+for+predicting+when+a+given+product+%0Ashould+be+rejected.+The+rules+are+intended+to+help+the+process+engineers+%0Aimprove+the+yield+of+the+product%2C+by+helping+them+to+discover+the+causes+%0Aof+rejection.+Experience+with+Q-YIELD+has+taught+us+the+importance+of+%0Adata+engineering+--+preprocessing+the+data+to+enable+or+facilitate+%0Adecision+tree+induction.+This+paper+discusses+some+of+the+data+engineering%0Aproblems+we+have+encountered+with+semiconductor+manufacturing+data.%0AThe+paper+deals+with+two+broad+classes+of+problems%3A+engineering+the+features+%0Ain+a+feature+vector+representation+and+engineering+the+definition+of+the+%0Atarget+concept+(the+classes).+Manufacturing+process+data+present+special+%0Aproblems+for+feature+engineering%2C+since+the+data+have+multiple+levels+of+%0Agranularity+(detail%2C+resolution).+Engineering+the+target+concept+is+important%2C+%0Adue+to+our+focus+on+understanding+the+past%2C+as+opposed+to+the+more+common+%0Afocus+in+machine+learning+on+predicting+the+future.&rft.date=1995&rft.type=Conference+Paper&rft.type=PeerReviewed&rft.format=application%2Fpdf&rft.identifier=http%3A%2F%2Fcogprints.org%2F2891%2F1%2FNRC-39163.pdf&rft.identifier=++Turney%2C+Peter++(1995)+Data+Engineering+for+the+Analysis+of+Semiconductor+Manufacturing+Data.++%5BConference+Paper%5D+++++&rft.relation=http%3A%2F%2Fcogprints.org%2F2891%2F