The University of Southampton

Thick-film piezoelectrics for MEMS: Optimisation and Applications

Date:
2001-2006
Themes:
Materials & Technology, MEMS, Sensor Technology
Funding:
EPSRC

This is an EPSRC Advanced Fellowship for Dr Steve Beeby to continue his research in the development and optimisation of active thick-film materials. The project is particularly concerned with the application of such thick-film materials to MEMS devices and this research has close links with other ECS projects (microfilter and sensors for prosthetic hands).

Primary investigator

Associated research groups

  • Electronic Systems and Devices Group
  • Electronics and Electrical Engineering
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