This is now an inactive research group it's members have moved on. You can find them at their new research groups:
- ESD - http://esd.ecs.soton.ac.uk
- ESS - http://ess.ecs.soton.ac.uk
ECS Intranet:
Micromachined Actuators
Micromachined actuators have a range of applications, e.g. for the integration of an Atomic Force Microscope (AFM) on a single chip, novel lithography techniques, micro-switches, etc. The project investigates thermal actuators to realise movement along three axes. A micro-fabrication process has been developed that allows to produce in-plane bimorphs consisting of aluminium and silicon. An actuator stage is being designed having a platform on which an atomically sharp tip can be placed. This can be used for scanning an area of a sample, thus obtaining an image of the sample topology. The actuators incorporate piezo-resistors which result in a resistance change proportional to strain due to surface-tip interaction.
Homepage: http://www.micro.ecs.soton.ac.uk/mems/Type: Normal Research Project
Research Groups: Nano Research Group, Southampton Nanofabrication Centre
Theme: MEMs and NEMs
Dates: ? to ?
Funding
- EPSRC
Principal Investigators
- agre
