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Ge catalytic growth of Carbon Nanotubes


bundle of single wall carbon nanotubes by Ge catalyst

A metal catalyst free growth method of carbon nanotubes (CNTs) has been developed using chemical vapor deposition (CVD) of CNTs on carbon implanted SiGe islands on Si substrates. From SEM and Raman measurements, the fabricated CNTs are identified as single wall CNTs (SWNTs) with diameter ranging from 1.2 to 1.6 nm. Essential parts of the substrate preparation after CVD SiGe growth and carbon implant are a chemical oxidization by hydrogen peroxide solution and a heat treatment at 1000°C prior to CNT growth. We believe that these processes enhance surface decomposition and assist the formation of carbon clusters, which play a role in seeding CNT growth. The growth technique is a practical method of growing metal free CNTs, opening up the prospect of merging CNT devices into silicon very-large-scale-integration (VLSI) technology.

Type: Normal Research Project
Research Groups: Nano Research Group, Southampton Nanofabrication Centre
Themes: Nanoelectronics, Photovoltaics and Energy
Dates: 1st July 2006 to 1st February 2010

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URI: http://id.ecs.soton.ac.uk/project/362
RDF: http://rdf.ecs.soton.ac.uk/project/362

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