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Publications List The following section provides the list of publications published during the VIBES program: 2004 Conferences "Micromachined silicon generator for harvesting power from vibrations" Beeby S. P., Tudor M. J., Koukharenko E., White N. M., O'Donnell T., Saha C., Kulkarni S., Roy S. PowerMEMS 2004 - Proceedings of The 4th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, pp.104-107 Kyoto, Japan, November 28-30th, 2004 2005 Conferences "Global Simulation of Self Powered Micro Systems" A.Zenati, Y.Ammar, K.Matou, S.Basrour DTIP '05 - Symposium on Design Testing Integration and Packaging of MEMS/MOEMS, pp. 178-181 Montreux, Switzerland, 1-3rd June 2005 "Design and Fabrication of Piezoelectric Micro Power Generators for Autonomous Microsystems" M. Marzencki, B. Charlot, S. Basrour, M. Colin, L. Valbin DTIP '05 - Symposium on Design Testing Integration and Packaging of MEMS/MOEMS, pp. 299-302 Montreux, Switzerland, 1-3rd June 2005 "A Bi-stable Micromachined Piezoelectric Transducer for Mechanical to Electrical Energy Transformation" K. Dogheche, B. Cavallier, P. Delobelle, L. Hirsinger, E. Cattan, D. Rèmiens, B. Charlot, M. Marzencki, S. Ballandras DTIP '05 - Symposium on Design Testing Integration and Packaging of MEMS/MOEMS, pp. 303-305 Montreux, Switzerland, 1-3rd June 2005 "Energy Storage Capacity of Vibrating Structure: Application to a shock system" B. Cavallier, H.Nouira, E.Folfête, L.Hirsinger, S.Ballandras DTIP '05 - Symposium on Design Testing Integration and Packaging of MEMS/MOEMS, pp. 391-393 Montreux, Switzerland, 1-3rd June 2005 "Design, fabrication and simulations of microelectromagnetic vibration powered generator for low power MEMS" Beeby, S. P., Tudor, M.J., Koukharenko, E., White, N.M., O'Donnell, T., Saha, C., Kulkarni, S. and Roy, S. DTIP '05, Proceedings of Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, pp. 374-379 Montreux, Switzerland, 01-03 June, 2005 "Design, Modelling and Optimisation of Integrated Piezoelectric Micro Power Generators" M. Marzencki, S. Basrour, B. Charlot Nanotech 2005, vol. 3, pp. 545-548 Anaheim, California, USA, June, 2005 "Design and performance of a microelectromagnetic vibration-powered generator" Beeby S. P., Tudor M.J., Koukharenko E., White N.M., O'Donnell T., Saha C., Kulkarni S., Roy S. Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems, Vol. 1, pp.780-783 Seoul, Korea, June 5-9th 2005 "Vibrational energy scavenging: design and fabrication of micropower generator" Roy S., Saha C., O'Donnell T., Kulkarni S., Tudor J., Beeby S., Bouffioux A., Ammar Y., Marzencki M., Fayet P., Basrour S. International Conference on Magnetic, MEMS and Micromachines Crete, Greece, 1-2 July, 2005 "Piezoelectric micro-machined ultrasonic transducer (pMUT) for energy harvesting" Dogheche K., Cavallier B., Delobelle P., Hirsinger L., Ballandras S., Cattan C., Rèmiens D. IEEE Ultrasonics Symposium, pp. 939-942. Rotterdam, Netherlands, 18-21 september, 2005 "Energy harvesting using vibrating structures excited by shock" Cavallier B., Berthelot P., Nouira, H., Foltête E., Hirsinger L., Ballandras S. IEEE Ultrasonics Symposium, pp. 943-945 Rotterdam, Netpherlands, 18-21 september 2005 "Design and fabrication of electromagnetic micropower generator using electroplated micro-magnets on silicon" Kulkarni S., Roy S., O'Donnell T., Beeby S., Tudor M. 50th Conference on Magnetism and Magnetic Materials San Jose, California, 30th October - 3rd November, 2005. "A MEMS Piezoelectric Vibration Energy Harvesting Device" M. Marzencki, S. Basrour, B. Charlot, M. Colin, S. Spirkovich PowerMEMS Conference, pp 45-48 Tokyo, Japan, 28-30 November 2005 "Design, simulation and fabrication of electromagnetic micropower generator using electroplated Co50Pt50 micromagnets" Kulkarni S, Roy S, O'Donnell T, Beeby S., Tudor J. MEMSNano Conference Indian Institute of Technology, Kharagpur, India, 19-22nd December, 2005 2006 *Conferences* "Multi-domain and mixed-signal simulation of System-on-Chip embedding MEMS" S. Basrour, K. Matou, Y. Ammar, M. Marzencki, A. Zenati EuroSimE 2006 - 7th. Int. Conf. on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, pp 400-4005 Como, Italy, 24-25 April, 2006 "Non linear techniques for increasing harvesting energy from piezoelectric and electromagnetic micro-power-generators" Y. Ammar, S. Basrour DTIP '06, Symposium on Design Testing Integration and Packaging of MEMS/MOEMS, pp 344-348 Stresa, Italy, 27-28 April 2006 "Macro and micro scale electromagnetic kinetic energy harvesting generators" Beeby S.P., Tudor, M.J. Torah, R.N. Koukharenko E., Roberts S., O'Donnell T., Roy S Proceedings of Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, pp.286-291 Stresa, Italy, April 26-28th , 2006 "Scaling effects for electromagnetic vibration power generators" O'Donnell T., Saha C., Beeby S.P., Tudor M.J. Proceedings of Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, pp.279-285 Stresa, Italy, April 26-28th, 2006. "Electromagnetic micro power generator on Silicon for wireless sensor nodes" Kulkarni S., Roy S., O'Donnell T., Beeby S., Tudor J. Proceeding of IEEE International Magnetics Conference San Diego, USA, May 8-12th , 2006 "Kinetic energy harvesting using micro scale electromagnetic generators" Torah R. N., Beeby S. P., Tudor M. J., O'Donnell T., Roy S. The 17th Workshop on Micromachining, MicroMechanics and Microsystems (MME 06), pp. 189-192 Southampton, UK, September 3-5th , 2006 "Enhanced Models for Power Output Prediction from Resonant Piezoelectric Micro Power Generators" M. Marzencki, S. Basrour Proceedings of the Eurosensors XX Conference, pp. 130-131 Göteborg, Sweden, 17-20 September 2006 "Enhanced models for power output prediction from resonant piezoelectric micro power generators", M. Marzencki S. Basrour Proceedings of the Eurosensors XX Conference Göteborg, Sweden, 17-20 September, 2006 "Development of a cantilever beam generator employing vibration energy harvesting" Torah, R. N., Beeby, S. P., Tudor, M. J., O'Donnell, T., Roy, S. PowerMEMS 2006 - The 6th Int. Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, pp. 181-184 Berkeley, U.S.A., November 29th - December 1st, 2006 Journals "Experimental comparison of macro and micro scale electromagnetic vibration powered generators" Beeby S.P., Tudor M.J., Torah R.N., Roberts S., O'Donnell T., Roy S. J. Microsystems Technologies 13 (11-12) pp. 1647-1653, 2006 "Scaling effects for electromagnetic vibration power generators" O'Donnell, T., Saha, C., Beeby, S.P., Tudor, M.J. J. Microsystems Technologies 13 (11-12) pp. 1637-1645,.2006 "MEMS based electromagnetic power generators on Si for powering wireless sensor network" Kulkarni S., Roy S., O'Donnell T., Beeby S., Tudor J IEEE Transaction on Magnetics 42 (10), pp. 3509-3511, 2006 "MEMS Vibration Powered Electromagnetic Generator for Wireless Sensors Applications" S. P. Beeby, M. J. Tudor, E. Koukharenko, N. M. White, T. O'Donnell, C. Saha, S. Kulkarni, S. Roy J. Microsystem Technologies April, 2006 "Vibration Based Electromagnetic MicroPower Generator on Silicon" Kulkarni S., Roy S., O'Donnell T., Beeby S., Tudor M.. J. Appl Phys, Vol. 99 (8) article no. 08P511, April 2006 "Microelectromechanical systems vibration powered electromagnetic generator for wireless applications" Koukharenko E., Beeby S.P., Tudor M.J., White N.M., O'Donnell T., Saha C., Kulkani S., Roy S. J. Microsystem Technologies, 12 (10-11) pp. 1071-1077, 2006 2007 *Conferences* "The wireless sensor node: Vision, challenges and key-results from some European projects" A. Bouffioux MEDEA+ Design Automation Conference Minatec, Grenoble, France,May 22 - 24, 2007 "Comparison of Piezoelectric MEMS Mechanical Vibration Energy Scavengers" M. Marzencki, S. Basrour, B. Belgacem, P. Muralt, M. Colin Nanotech 2007 - CRC Press p 21 - 24. Vol.3. ISBN 1-4200-6349-9 Santa Clara, California, May 20-24, 2007. "Fabrication and test of integrated micro-scale vibration based electromagnetic generator" S. Kulkarni, E. Koukharenko, J. Tudor, S. Beeby, T. O'Donnell, S. Roy Digest of Technical Papers Eurosensors XXI/Transducers '07, Vol. 1, pp. 879-882 Lyon, France, June 10-14, 2007 "Integrated Power Harvesting System Including a MEMS Generator and a Power Management Circuit" M. Marzencki, Y. Ammar and S. Basrour Transducers'07/Eurosensors XXI, p 887-890. ISBN: 1-4244-0842-3/07 Lyon, France, June 10-14, 2007 "Autonomous low power microsystem powered by vibration energy harvesting" Torah R.N., Tudor M.J., Patel K., Garcia I.N., Beeby S.P. Accepted 6th Annual IEEE Conference on Sensors Atlanta, Georgia, USA, October 28-31st , 2007 "Energy aware wireless microsystem powered by vibration energy harvesting" Torah R. N., Beeby S. P., Tudor M. J., O'Donnell T., Roy S PowerMEMS 2007 - Submitted to the 7th Int. Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications Freiburg, Germany, November 28-29th, 2007 *Journals* "Experimental comparison of macro and micro scale electromagnetic vibration powered generators" S.P.Beeby, M.J.Tudor, R. N. Torah, S. Roberts, T.O'Donnell, and S.Roy J. Microsystem Technologies, Jan, 2007 "Development of nano-structured, stress-free Co-rich CoPtP films for magnetic MEMS applications" S. Kulkarni, S. Roy. J. Appl. Phys, v. 101, n. 9, may 2007. "Micro Electromagnetic Generator for Vibration Energy Harvesting" Beeby S.P., Tudor M.J., Torah R.N., O'Donnell T., Roy S. J. Micromech. Microeng. 17 pp. 1257-1265, 2007 June, 2007

Publications List

The following section provides the list of publications published during the VIBES program:

2004

Conferences

"Micromachined silicon generator for harvesting power from vibrations"
Beeby S. P., Tudor M. J., Koukharenko E., White N. M., O'Donnell T., Saha C., Kulkarni S., Roy S.
PowerMEMS 2004 - Proceedings of The 4th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, pp.104-107
Kyoto, Japan, November 28-30th, 2004

2005

Conferences

"Global Simulation of Self Powered Micro Systems"
A.Zenati, Y.Ammar, K.Matou, S.Basrour
DTIP '05 - Symposium on Design Testing Integration and Packaging of MEMS/MOEMS, pp. 178-181
Montreux, Switzerland, 1-3rd June 2005

"Design and Fabrication of Piezoelectric Micro Power Generators for Autonomous Microsystems"
M. Marzencki, B. Charlot, S. Basrour, M. Colin, L. Valbin
DTIP '05 - Symposium on Design Testing Integration and Packaging of MEMS/MOEMS, pp. 299-302
Montreux, Switzerland, 1-3rd June 2005

"A Bi-stable Micromachined Piezoelectric Transducer for Mechanical to Electrical Energy Transformation"
K. Dogheche, B. Cavallier, P. Delobelle, L. Hirsinger, E. Cattan, D. Rèmiens, B. Charlot, M. Marzencki, S. Ballandras
DTIP '05 - Symposium on Design Testing Integration and Packaging of MEMS/MOEMS, pp. 303-305
Montreux, Switzerland, 1-3rd June 2005

"Energy Storage Capacity of Vibrating Structure: Application to a shock system"
B. Cavallier, H.Nouira, E.Folfête, L.Hirsinger, S.Ballandras
DTIP '05 - Symposium on Design Testing Integration and Packaging of MEMS/MOEMS, pp. 391-393
Montreux, Switzerland, 1-3rd June 2005

"Design, fabrication and simulations of microelectromagnetic vibration powered generator for low power MEMS"
Beeby, S. P., Tudor, M.J., Koukharenko, E., White, N.M., O'Donnell, T., Saha, C., Kulkarni, S. and Roy, S.
DTIP '05, Proceedings of Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, pp. 374-379
Montreux, Switzerland, 01-03 June, 2005

"Design, Modelling and Optimisation of Integrated Piezoelectric Micro Power Generators"
M. Marzencki, S. Basrour, B. Charlot
Nanotech 2005, vol. 3, pp. 545-548
Anaheim, California, USA, June, 2005

"Design and performance of a microelectromagnetic vibration-powered generator"
Beeby S. P., Tudor M.J., Koukharenko E., White N.M., O'Donnell T., Saha C., Kulkarni S., Roy S.
Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems, Vol. 1, pp.780-783
Seoul, Korea, June 5-9th 2005

"Vibrational energy scavenging: design and fabrication of micropower generator"
Roy S., Saha C., O'Donnell T., Kulkarni S., Tudor J., Beeby S., Bouffioux A., Ammar Y., Marzencki M., Fayet P., Basrour S.
International Conference on Magnetic, MEMS and Micromachines
Crete, Greece, 1-2 July, 2005

"Piezoelectric micro-machined ultrasonic transducer (pMUT) for energy harvesting"
Dogheche K., Cavallier B., Delobelle P., Hirsinger L., Ballandras S., Cattan C., Rèmiens D.
IEEE Ultrasonics Symposium, pp. 939-942.
Rotterdam, Netherlands, 18-21 september, 2005

"Energy harvesting using vibrating structures excited by shock"
Cavallier B., Berthelot P., Nouira, H., Foltête E., Hirsinger L., Ballandras S.
IEEE Ultrasonics Symposium, pp. 943-945
Rotterdam, Netpherlands, 18-21 september 2005

"Design and fabrication of electromagnetic micropower generator using electroplated micro-magnets on silicon"
Kulkarni S., Roy S., O'Donnell T., Beeby S., Tudor M.
50th Conference on Magnetism and Magnetic Materials
San Jose, California, 30th October - 3rd November, 2005.

"A MEMS Piezoelectric Vibration Energy Harvesting Device"
M. Marzencki, S. Basrour, B. Charlot, M. Colin, S. Spirkovich
PowerMEMS Conference, pp 45-48
Tokyo, Japan, 28-30 November 2005

"Design, simulation and fabrication of electromagnetic micropower generator using electroplated Co50Pt50 micromagnets"
Kulkarni S, Roy S, O'Donnell T, Beeby S., Tudor J.
MEMSNano Conference
Indian Institute of Technology, Kharagpur, India, 19-22nd December, 2005

2006

Conferences

"Multi-domain and mixed-signal simulation of System-on-Chip embedding MEMS"
S. Basrour, K. Matou, Y. Ammar, M. Marzencki, A. Zenati
EuroSimE 2006 - 7th. Int. Conf. on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, pp 400-4005
Como, Italy, 24-25 April, 2006

"Non linear techniques for increasing harvesting energy from piezoelectric and electromagnetic micro-power-generators"
Y. Ammar, S. Basrour
DTIP '06, Symposium on Design Testing Integration and Packaging of MEMS/MOEMS, pp 344-348
Stresa, Italy, 27-28 April 2006

"Macro and micro scale electromagnetic kinetic energy harvesting generators"
Beeby S.P., Tudor, M.J. Torah, R.N. Koukharenko E., Roberts S., O'Donnell T., Roy S
Proceedings of Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, pp.286-291
Stresa, Italy, April 26-28th , 2006

"Scaling effects for electromagnetic vibration power generators"
O'Donnell T., Saha C., Beeby S.P., Tudor M.J.
Proceedings of Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, pp.279-285
Stresa, Italy, April 26-28th, 2006.

"Electromagnetic micro power generator on Silicon for wireless sensor nodes"
Kulkarni S., Roy S., O'Donnell T., Beeby S., Tudor J.
Proceeding of IEEE International Magnetics Conference
San Diego, USA, May 8-12th , 2006

"Kinetic energy harvesting using micro scale electromagnetic generators"
Torah R. N., Beeby S. P., Tudor M. J., O'Donnell T., Roy S.
The 17th Workshop on Micromachining, MicroMechanics and Microsystems (MME 06), pp. 189-192
Southampton, UK, September 3-5th , 2006

"Enhanced Models for Power Output Prediction from Resonant Piezoelectric Micro Power Generators"
M. Marzencki, S. Basrour
Proceedings of the Eurosensors XX Conference, pp. 130-131
Göteborg, Sweden, 17-20 September 2006

"Enhanced models for power output prediction from resonant piezoelectric micro power generators",
M. Marzencki S. Basrour
Proceedings of the Eurosensors XX Conference
Göteborg, Sweden, 17-20 September, 2006

"Development of a cantilever beam generator employing vibration energy harvesting"
Torah, R. N., Beeby, S. P., Tudor, M. J., O'Donnell, T., Roy, S.
PowerMEMS 2006 - The 6th Int. Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, pp. 181-184
Berkeley, U.S.A., November 29th - December 1st, 2006

Journals

"Experimental comparison of macro and micro scale electromagnetic vibration powered generators"
Beeby S.P., Tudor M.J., Torah R.N., Roberts S., O'Donnell T., Roy S.
J. Microsystems Technologies 13 (11-12) pp. 1647-1653, 2006

"Scaling effects for electromagnetic vibration power generators"
O'Donnell, T., Saha, C., Beeby, S.P., Tudor, M.J.
J. Microsystems Technologies 13 (11-12) pp. 1637-1645,.2006

"MEMS based electromagnetic power generators on Si for powering wireless sensor network"
Kulkarni S., Roy S., O'Donnell T., Beeby S., Tudor J
IEEE Transaction on Magnetics 42 (10), pp. 3509-3511, 2006

"MEMS Vibration Powered Electromagnetic Generator for Wireless Sensors
Applications"
S. P. Beeby, M. J. Tudor, E. Koukharenko, N. M. White, T. O'Donnell, C. Saha, S. Kulkarni, S. Roy
J. Microsystem Technologies April, 2006

"Vibration Based Electromagnetic MicroPower Generator on Silicon"
Kulkarni S., Roy S., O'Donnell T., Beeby S., Tudor M..
J. Appl Phys, Vol. 99 (8) article no. 08P511, April 2006

"Microelectromechanical systems vibration powered electromagnetic generator for wireless applications"
Koukharenko E., Beeby S.P., Tudor M.J., White N.M., O'Donnell T., Saha C., Kulkani S., Roy S.
J. Microsystem Technologies, 12 (10-11) pp. 1071-1077, 2006

2007

Conferences

"The wireless sensor node: Vision, challenges and key-results from some European projects"
A. Bouffioux
MEDEA+ Design Automation Conference
Minatec, Grenoble, France,May 22 - 24, 2007

"Comparison of Piezoelectric MEMS Mechanical Vibration Energy Scavengers"
M. Marzencki, S. Basrour, B. Belgacem, P. Muralt, M. Colin
Nanotech 2007 - CRC Press p 21 - 24. Vol.3. ISBN 1-4200-6349-9
Santa Clara, California, May 20-24, 2007.

"Fabrication and test of integrated micro-scale vibration based electromagnetic generator"
S. Kulkarni, E. Koukharenko, J. Tudor, S. Beeby, T. O'Donnell, S. Roy
Digest of Technical Papers Eurosensors XXI/Transducers '07, Vol. 1, pp. 879-882
Lyon, France, June 10-14, 2007

"Integrated Power Harvesting System Including a MEMS Generator and a Power Management Circuit"
M. Marzencki, Y. Ammar and S. Basrour
Transducers'07/Eurosensors XXI, p 887-890. ISBN: 1-4244-0842-3/07
Lyon, France, June 10-14, 2007

"Autonomous low power microsystem powered by vibration energy harvesting"
Torah R.N., Tudor M.J., Patel K., Garcia I.N., Beeby S.P.
Accepted 6th Annual IEEE Conference on Sensors
Atlanta, Georgia, USA, October 28-31st , 2007

"Energy aware wireless microsystem powered by vibration energy harvesting"
Torah R. N., Beeby S. P., Tudor M. J., O'Donnell T., Roy S
PowerMEMS 2007 - Submitted to the 7th Int. Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
Freiburg, Germany, November 28-29th, 2007

Journals

"Experimental comparison of macro and micro scale electromagnetic vibration
powered generators"
S.P.Beeby, M.J.Tudor, R. N. Torah, S. Roberts, T.O'Donnell, and S.Roy
J. Microsystem Technologies, Jan, 2007

"Development of nano-structured, stress-free Co-rich CoPtP films for
magnetic MEMS applications"
S. Kulkarni, S. Roy.
J. Appl. Phys, v. 101, n. 9, may 2007.

"Micro Electromagnetic Generator for Vibration Energy Harvesting"
Beeby S.P., Tudor M.J., Torah R.N., O'Donnell T., Roy S.
J. Micromech. Microeng. 17 pp. 1257-1265, 2007
June, 2007